Spatially resolved absolute densities of atomic oxygen obtained experimentally for N = 4 as a function of the peak-to-peak value of the driving voltage waveform. The data are measured at positions y = 0.5 mm and z = -15 mm. The O2 admixture concentration is fixed at 0.5 %. The powered electrode is located at x = 0, while the grounded electrode is at x = 1 mm. The base frequency is f0 = 13.56 MHz. The waveform type is “peaks”.
Experimental data are marked as exp
Calculated data are marked as calc
Figure 12 350V: (red) exp
Figure 12 450V: (white) exp
Figure 12 500V: (olive green) exp
Figure 12 550V: (blue) exp
x (mm),y (exp atomic oxygen densities (cm-3))