(a) Spatially resolved absolute densities of atomic oxygen obtained experimentally and computed from the numerical solution of eq. (8). (b) Peak and mean (spatially averaged) values of the atomic oxygen density obtained from the measured data and (c) normalized constant of proportionality used in equation (10) to relate the time averaged atomic oxygen source to the time averaged measured electron impact excitation rate as a function of the number consecutive driving harmonics, N, at y = 0.5 mm, z = -15 mm and for an O2 flow corresponding to an admixture concentration of 0.5 % for “peaks”-waveforms. The normalization is performed by dividing by the proportionality constant for the N = 1 case. The powered electrode is located at x = 0, while the grounded electrode is at x = 1 mm. The base frequency is f0 = 13.56 MHz and φpp = 500 V.
Experimental data are marked as exp
Calculated data are marked as calc
Figure 4 a) exp
x (mm),y (exp atomic oxygen densities (cm-3)),
Harmonics used: 1(red), 2(olive green), 3(white) and 4(blue)
Figure 4 a) calc
x (mm),y (calc atomic oxygen densities (cm-3)),
Harmonics used: 1(red_dashed), 2(olive green_dashed), 3(white_dashed) and 4(blue_dashed)
Figure 4 b)
x (N),y (exp atomic oxygen densities (cm-3)),
Figure 4 c)
x (N),y (Normalized k)