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Plasma Source

Plasma Diagnostic

Plasma Specification

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AEPT
  • Magnetically induced formation and disruption of striations in capacitively coupled radio-frequency CF4 plasmas

Figure 1

AEPT
  • Magnetically induced formation and disruption of striations in capacitively coupled radio-frequency CF4 plasmas

SEM electrolyte KOH

EP2
  • Nanosecond and microsecond-pulsed plasma-in-liquid treated copper oxide surfaces