With the increasing demands towards large area plasma etching and deposition, the radial uniformity of capacitively coupled plasmas (CCPs) becomes one of the key factors that determine process performance in industrial applications. However,...
A Direct Current (DC) nanosecond (ns)-pulsed plasma jet fed with N2 at near atmospheric pressure (20 000 Pa) is studied using a transient zero-dimensional (0-D) model coupled with a two-term Boltzmann equation solver. Good agreement is observed...
The abatement of volatile organic compounds (VOCs) from industrial exhaust gases is critical for environmental compliance. Surface dielectric barrier discharge (SDBD) reactors enable plasma- driven oxidation of hydrocarbons such as n-butane under...
While the ozonolysis of tetramethylethylene (TME) has been investigated in detail, studies combining plasma-generated ozone with TME are scarce. Here, we present a feasibility study using a twin-surface dielectric barrier discharge (twin-SDBD)...
