(a)-(c) 2D spatial distribution of the atomic oxygen density inside the jet obtained from the numerical solution of equation (8) for diﬀerent numbers of consecutive harmonics, N. (d)-(f) Spatially resolved atomic oxygen production rate determined from equation (10). The base frequency is f0 = 13.56 MHz and the peak-topeak value of the driving voltage waveform is kept constant at 500 V. The concentration of the O2 admixture is 0.5 %.

Experimental data are marked as exp

Calculated data are marked as calc

(Figure6a-6c):

x [mm] , y[cm^-3], z[mm]

Calc spatial distribution of the atomic oxygen density for N=1, N=2 and N=4 respectively

(Figure6d-6f):

x [mm] , y[m^-3 s^-1]

Calc spatially resolved atomic oxygen production rate for N=1, N=2 and N=4 respectively

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