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A spatially two dimensional fluid-MC hybrid (fluid-kinetic) simulation method is developed and applied to the COST reference microplasma jet operated in helium with an oxygen admixture of 0.5\%, excited by a single frequency voltage waveform with f=13.56 MHz and Vrms=275 V. The simulation approach is based on a fluid model augmented by a Monte Carlo module that generates electron impact rates for the continuity equations solved by the fluid module. The simulation results are compared to previous measurements of atomic oxygen densities (Steuer D et al. 2021 J. Phys. D: Appl. Phys. 54 355204), and show a very good agreement. It is found that the buildup and saturation of the atomic oxygen density distribution along the jet are due to the interplay of chemical and electron impact reactions as well as of the gas flow.
| Field | Value |
|---|---|
| Publisher | |
| Authors | |
| Release Date | 2024-01-15 |
| Identifier | 9f2e744d-6634-46a2-89e3-61c14e26a5d2 |
| Permanent Identifier (URI) | |
| Plasma Source Name | |
| Plasma Source Application | |
| Plasma Source Specification | |
| Plasma Source Properties | COST-jet, consists of two identical and co-planar parallel electrodes made of stainless steel. The electrode gap is 1 mm. The electrodes are enclosed by two quartz plates confining the plasma volume to 1×1×30 mm^3. The frequency is 13.56 MHz, the RMS voltage amplitude is 275 V. |
| Language | English |
| License | |
| Plasma Medium Name | |
| Plasma Medium Properties | 99.5% He / 0.5% O2, with varying gas flows (1.0 slm, 0.6 slm, 0.2 slm) |
| Contact Name | Mate Vass |
| Contact Email | |
| Public Access Level | Public |
| Funding Agency | |
| Project | |
| Subproject |
Data and Resources
- Simulation data for figures 3-11csv
THe data includes all contourmaps/lines from figures 3-11.
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