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Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges

Plasma Modeling and Simulation

This work utilizes 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations of a symmetric discharge in the low-pressure regime with the inclusion of realistic electron-surface interactions for silicon dioxide.
A diagnostic framework is introduced that segregates the electrons into three groups (bulk-electrons, $\upgamma$-electrons, and $\updelta$-electrons) in order to analyze and discuss their dynamics.
A variation of the electrode gap size is then presented as a control tool to alter the dynamics of the discharge significantly.
It is demonstrated that this control results in two different regimes of low and high plasma density, respectively.
The fundamental electron dynamics of both regimes are explained, which requires a complete analysis starting at global parameters (e.g., densities) down to single electron trajectories.

FieldValue
Publisher
AEPT
Authors
K. Noesges
M. Klich
B. Horvath
J. Schulze
R. P. Brinkmann
T. Mussenbrock
S. Wilczek
A. Derzsi
Release Date
2023-07-13
Identifier
d80ea6b8-6e4c-4202-a358-d18b9de2cf73
Permanent Identifier (URI)
https://rdpcidat.rub.de/node/661
Is supplementing
Plasma Sources Sci. Technol. 32 085008 (2023)
Plasma Source Name
CCP
Plasma Source Application
Plasma etching
Plasma Source Specification
low pressure
high frequency
Plasma Source Properties
Harmonic waveform: $V(t)\,=\,V_{\rm{0}}\, \sin{(2\pi ft})$ with $V_{\rm{0}}\,=\,500\,\rm{V}$ and $f\,=\,27.12\,\rm{MHz}$ is applied
License
Creative Commons Attribution 4.0 International
Plasma Medium Name
Ar
Contact Name
Katharina Noesges
Contact Email
katharina.noesges@rub.de
Plasma Diagnostic Properties
The electron dynamics of a symmetric CCRF discharge are studied using the benchmarked $1d3v$ PIC/MCC simulation code called \textit{yapic1D}. It is a kinetic electrostatic plasma simulation in which particles are traced within an equidistant Cartesian grid with a cell size of $\Delta x = L_{\rm{gap}}/N_{\rm{cells}}$. The number of cells $N_{\rm{cells}}$ is adjusted so that the Debye length $\lambda_{D}$ is resolved. The plane and parallel electrodes of the CCP are treated as infinite. A harmonic waveform of $V(t)\,=\,V_{\rm{0}}\, \sin{(2\pi ft})$ with $V_{\rm{0}}\,=\,500\,\rm{V}$ and $f\,=\,27.12\,\rm{MHz}$ is applied to the electrode at $x\,=\,0\,\rm{mm}$, while the opposite electrode is grounded. The time step is calculated as $\Delta t\,=\,(fN_{\rm{tspc}})\textsuperscript{-1}$, with $N_{\rm{tspc}}$ being the number of time steps per cycle. $N_{\rm{tspc}}$ is chosen to satisfy the requirements regarding the electron plasma frequency and to ensure that the Courant-Friedrichs-Lewy condition is always fulfilled. The concept of superparticles, each representing a large number of particles, is used to lower the computational load of the system. The following simulation results were computed with $10^{5}$ superparticles for ions and electrons. In these simulations, collisions are treated with the MCC method combined with a null collision scheme. Argon is used as a background gas and modeled with the cross section set of Phelps. Electron-neutral collisions (elastic scattering, excitation and ionization) as well as ion-neutral collisions (isotropic and backward scattering) are considered.
Public Access Level
Public
Plasma Diagnostic Name
PIC/MCC simulation

Data and Resources

Katharina Noesges