This work utilizes 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations of a symmetric discharge in the low-pressure regime with the inclusion of realistic electron-surface interactions for silicon dioxide.

A diagnostic framework is introduced that segregates the electrons into three groups (bulk-electrons, $\upgamma$-electrons, and $\updelta$-electrons) in order to analyze and discuss their dynamics.

A variation of the electrode gap size is then presented as a control tool to alter the dynamics of the discharge significantly.

It is demonstrated that this control results in two different regimes of low and high plasma density, respectively.

The fundamental electron dynamics of both regimes are explained, which requires a complete analysis starting at global parameters (e.g., densities) down to single electron trajectories.

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Publisher | |

Authors | |

Release Date | 2023-07-13 |

Identifier | d80ea6b8-6e4c-4202-a358-d18b9de2cf73 |

Permanent Identifier (URI) | |

Is supplementing | |

Plasma Source Name | |

Plasma Source Application | |

Plasma Source Specification | |

Plasma Source Properties | Harmonic waveform: $V(t)\,=\,V_{\rm{0}}\, \sin{(2\pi ft})$ with $V_{\rm{0}}\,=\,500\,\rm{V}$ and $f\,=\,27.12\,\rm{MHz}$ is applied |

License | |

Plasma Medium Name | |

Contact Name | Katharina Noesges |

Contact Email | |

Plasma Diagnostic Properties | The electron dynamics of a symmetric CCRF discharge are studied using the benchmarked $1d3v$ PIC/MCC simulation code called \textit{yapic1D}. It is a kinetic electrostatic plasma simulation in which particles are traced within an equidistant Cartesian grid with a cell size of $\Delta x = L_{\rm{gap}}/N_{\rm{cells}}$. The number of cells $N_{\rm{cells}}$ is adjusted so that the Debye length $\lambda_{D}$ is resolved.
The plane and parallel electrodes of the CCP are treated as infinite.
A harmonic waveform of $V(t)\,=\,V_{\rm{0}}\, \sin{(2\pi ft})$ with $V_{\rm{0}}\,=\,500\,\rm{V}$ and $f\,=\,27.12\,\rm{MHz}$ is applied to the electrode at $x\,=\,0\,\rm{mm}$, while the opposite electrode is grounded. The time step is calculated as $\Delta t\,=\,(fN_{\rm{tspc}})\textsuperscript{-1}$, with $N_{\rm{tspc}}$ being the number of time steps per cycle. $N_{\rm{tspc}}$ is chosen to satisfy the requirements regarding the electron plasma frequency and to ensure that the Courant-Friedrichs-Lewy condition is always fulfilled. The concept of superparticles, each representing a large number of particles, is used to lower the computational load of the system. The following simulation results were computed with $10^{5}$ superparticles for ions and electrons.
In these simulations, collisions are treated with the MCC method combined with a null collision scheme.
Argon is used as a background gas and modeled with the cross section set of Phelps. Electron-neutral collisions (elastic scattering, excitation and ionization) as well as ion-neutral collisions (isotropic and backward scattering) are considered. |

Public Access Level | Public |

Plasma Diagnostic Name |

#### Data and Resources

- Averaged electron densities for SM Atxt
Used to generate Figure 1.

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1. column: electrode gap size

2.... - Averaged electron densities for SM Btxt
Used to generate Figure 1.

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1. column: electrode gap size

2.... - Averaged electron densities for SM Ctxt
Used to generate Figure 1.

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1. column: electrode gap size

2.... - Averaged electron densities for SM Dtxt
Used to generate Figure 1.

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1. column: electrode gap size

2.... - averaged electron densities for SM Etxt
Used to generate Figure 1.

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1. column: electrode gap size

2.... - Total RF current density for SM Atxt
Used to generate Figure 2a

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1. column: electrode gap size

2.... - Total RF current density for SM Btxt
Used to generate Figure 2a

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1. column: electrode gap size

2.... - Total RF current density for SM Ctxt
Used to generate Figure 2a

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1. column: electrode gap size

2.... - Total RF current density for SM Dtxt
Used to generate Figure 2a

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1. column: electrode gap size

2.... - Total RF current density for SM Etxt
Used to generate Figure 2a

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1. column: electrode gap size

2.... - Electron power densities for SM Atxt
- column: electrode gap size
- column: total electron power... Download

- Electron power densities for SM Btxt
- column: electrode gap size
- column: total electron power... Download

- Electron power densities for SM Ctxt
- column: electrode gap size
- column: total electron power... Download

- Electron power densities for SM Dtxt
- column: electrode gap size
- column: total electron power... Download

- Electron power densities for SM Etxt
- column: electrode gap size
- column: total electron power... Download

- Fraction of each electron group density to the total electron density for SM Btxt
Data is used to generate Figure 5a

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1. column: fraction of bulk... - Fraction of each electron group density to the total electron density for SM Ctxt
Data is used to generate Figure 5b

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1. column: fraction of bulk... - Fraction of each electron group density to the total electron density for SM Etxt
Data is used to generate Figure 5c

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1. column: fraction of bulk... - Contribution of each electron group to the total ionization rate for SM Btxt
Data is used to generate Figure 5d

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1. column: contribution of bulk... - Contribution of each electron group to the total ionization rate for SM Ctxt
Data is used to generate Figure 5e

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1. column: contribution of bulk... - Contribution of each electron group to the total ionization rate for SM Etxt
Data is used to generate Figure 5f

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1. column: contribution of bulk... - EEDF of bulk electrons for 55mmtxt
Data used to generate Figure 6a

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1. column: energy bins

2. column... - EEDF of gamma electrons for 55mmtxt
Data used to generate Figure 6a

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1. column: energy bins

2. column... - EEDF of delta electrons for 55mmtxt
Data used to generate Figure 6a

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1. column: energy bins

2. column... - EEDF of bulk electrons for 25mmtxt
Data used to generate Figure 6b

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1. column: energy bins

2. column... - EEDF of gamma electrons for 25mmtxt
Data used to generate Figure 6b

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1. column: energy bins

2. column... - EEDF of delta electrons for 25mmtxt
Data used to generate Figure 6b

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1. column: energy bins

2. column... - Spatio temporal electric field data for 55mmtxt
Electric field data in V/m for SM E ($r\,=\,r(\epsilon),\, \gamma\,=\,0.4...

Download - Spatio temporal bulk electron flux data for 55mmtxt
Electron flux data in A/m^2 for SM E.

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Used to calculate the electron... - Spatio temporal gamma electron flux data for 55mmtxt
Electron flux data in A/m^2 for SM E.

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Used to calculate the electron... - Spatio temporal delta electron flux data for 55mmtxt
Electron flux data in A/m^2 for SM E.

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Used to calculate the electron... - Spatio temporal fast bulk electron density data for 55mm (down)txt
Spatio temporal distribution of the bulk electron density in m^3 with...

Download - spatio temporal fast bulk electron density data for 55mm (up)txt
Spatio temporal distribution of the bulk electron density in m^3 with...

Download - Spatio temporal fast gamma electron density data for 55mm (down)txt
Spatio temporal distribution of the gamma electron density in m^3 with...

Download - Spatio temporal fast gamma electron density data for 55mm (up)txt
Spatio temporal distribution of the gamma electron density in m^3 with...

Download - Spatio temporal fast delta electron density data for 55mm (down)txt
Spatio temporal distribution of the delta electron density in m^3 with...

Download - Spatio temporal fast delta electron density data for 55mm (up)txt
Spatio temporal distribution of the delta electron density in m^3 with...

Download - Spatio temporal electric field data for 25mmtxt
Electric field data in V/m for SM E ($r\,=\,r(\epsilon),\, \gamma\,=\,0.4...

Download - Spatio temporal bulk electron flux data for 25mmtxt
Electron flux data in A/m^2 for SM E.

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Used to calculate the electron... - Spatio temporal gamma electron flux data for 25mmtxt
Electron flux data in A/m^2 for SM E.

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Used to calculate the electron... - Spatio temporal delta electron flux data for 25mmtxt
Electron flux data in A/m^2 for SM E.

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Used to calculate the electron... - Spatio temporal fast bulk electron density data for 25mm (down)txt
Spatio temporal distribution of the bulk electron density in m^3 with...

Download - Spatio temporal fast bulk electron density data for 25mm (up)txt
Spatio temporal distribution of the bulk electron density in m^3 with...

Download - Spatio temporal fast gamma electron density data for 25mm (down)txt
Spatio temporal distribution of the gamma electron density in m^3 with...

Download - Spatio temporal fast gamma electron density data for 25mm (up)txt
Spatio temporal distribution of the gamma electron density in m^3 with...

Download - Spatio temporal fast delta electron density data for 25mm (down)txt
Spatio temporal distribution of the delta electron density in m^3 with...

Download - Spatio temporal fast delta electron density data for 25mm (up)txt
Spatio temporal distribution of the delta electron density in m^3 with...

Download - Individual SEs trajectories for 55mmzip
Date used to generate Figure 8

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1. column: time in s

2. column:... - Individual SEs trajectories for 25mmzip
Date used to generate Figure 10

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1. column: time in s

2. column:... - Single particle trajectories for 25mmzip
Date used to generate Figure 11

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1. column: time in s

2. column:... - Spatio temporal electric field data for 25mm and SM Atxt
Electric field data in V/m

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Used to calculate the electron power... - Spatio temporal electric field data for 55mm and SM Atxt
Electric field data in V/m

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Used to calculate the electron power... - Spatio temporal electron flux data for 25mm and SM Atxt
Electron flux data in A/m^2.

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Used to calculate the electron power... - Spatio temporal electron flux data for 55mm and SM Atxt
Electron flux data in A/m^2.

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Used to calculate the electron power... - Spatio temporal fast electron density data for 25mm and SM A (down)txt
Spatio temporal distribution of the electron density in m^3 with energies...

Download - Spatio temporal fast electron density data for 25mm and SM A (up)txt
Spatio temporal distribution of the electron density in m^3 with energies...

Download - Spatio temporal fast electron density data for 55mm and SM A (down)txt
Spatio temporal distribution of the electron density in m^3 with energies...

Download - Spatio temporal fast electron density data for 55mm and SM A (up)txt
Spatio temporal distribution of the electron density in m^3 with energies...

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