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Figure 6

Modeling the SE EEDF for 1000 eV argon ions incident on aluminum(Al)
(a) and aluminum oxide (Al2O3) (b). The solid lines denote N0(Ek), Ni(Ek) and the
convolution of N0(Ek) with a Gaussian width of 8eV. The data points are the same as
in Carles Corbella et al 2016 J. Phys. D: Appl. Phys. 49 16LT01. The dashed vertical lines denote the kinetic energies of Auger electrons from
the literature (NIST Database). The green solid line denotes the EEDF N0 of the electrons outside
the solid and the blue solid line its convolution with a Gaussian width of 8 eV, for
details see text. The black solid line denotes the EEDF Ni(Ek) of the electrons inside
the solid. For comparison, the EEDF of the electrons inside and outside the solid from
the original Hagstrum model for clean aluminum are shown as black and green dashed
lines, respectively.

SE EEDF Measurements with ECR source.

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timestampMay 25, 2023