Figure 2

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SE EEDF (Secondary electron energy distribtuion funtion) N0(Ek) for argon ions on metallic aluminum (Al) (enlarged by a factor 5) and on aluminum oxide (Al2O3) at ion energies of 500 eV (a), 800 eV (b) and 1000 eV (c). The lines connecting the data points serve as a guide for the eye.
Data from Carles Corbella et al 2016 J. Phys. D: Appl. Phys. 49 16LT01.
The ECR source was used for the SE EEDF measurements.

Figure 2_SE EEDF_Ar on Al and Al2O3_measurements.txt

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timestamp	May 25, 2023