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Figure 2

SE EEDF (Secondary electron energy distribtuion funtion) N0(Ek) for argon ions on metallic aluminum (Al) (enlarged by a factor 5) and on aluminum oxide (Al2O3) at ion energies of 500 eV (a), 800 eV (b) and 1000 eV (c). The lines connecting the data points serve as a guide for the eye.
Data from Carles Corbella et al 2016 J. Phys. D: Appl. Phys. 49 16LT01.
The ECR source was used for the SE EEDF measurements.

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resource typefile upload
timestampMay 25, 2023