--Ar on metallic Al--
	
ion energy (eV)	500eV
electron energy (eV)	SE EEDF(e-/ion/eV) (enlarged by factor 5)
150	1.69177E-17
100	8.45884E-18
70	5.63923E-17
55	-2.81961E-17
50	-0.00113
45	5.66893E-4
40	0.0051
35	0.00737
30	0.00737
25	0.00397
20	8.45678E-17
15	0.00454
10	0.00879
0	0.00737
-10	0.00624
-20	0.00283
-30	-2.83447E-4
-40	-5.66893E-4
-50	-2.11471E-17
-70	-2.11471E-17
-100	-8.45884E-18
-150	-1.69177E-17

ion energy (eV)	800eV
electron energy (eV)	SE EEDF(e-/ion/eV) (enlarged by factor 5)
150	-4.12286E-4
120	-4.38054E-4
110	-7.73036E-5
100	0.00108
95	0.00216
90	0.00433
85	0.00618
80	0.00711
75	0.00711
70	0.00557
65	0.00433
60	0.0051
55	0.00541
50	0.00557
45	0.00618
40	0.00371
35	9.27644E-4
30	0.00139
25	0.0017
20	0.00371
15	0.00928
10	0.00989
0	0.00758
-10	0.00649
-20	0.00371
-30	9.27644E-4
-40	-1.54607E-4
-50	-3.09215E-4
-70	-2.30696E-17
-100	-9.22783E-18
-150	-1.84557E-17

ion energy (eV)	1000eV
electron energy (eV)	SE EEDF(e-/ion/eV) (enlarged by factor 5)
150	-6.34921E-4
120	-6.74603E-4
110	-1.19048E-4
100	0.00119
95	0.00405
90	0.0081
85	0.01167
80	0.01214
75	0.00905
70	0.00667
65	0.005
60	0.00238
55	0.00143
50	0.00214
45	0.005
40	0.00833
35	0.00833
30	0.005
25	0.00119
20	0.0019
15	0.00714
10	0.00833
0	0.00571
-10	0.00381
-20	0.00107
-30	-3.57143E-4
-40	-2.38095E-4
-50	-3.55271E-17
-70	-2.36848E-17
-100	-4.73695E-17


--Ar on Al2O3--

ion energy 500eV
electron energy (eV)	SE EEDF(e-/ion/eV)
150	-1.19923E-17
120	-5.99614E-18
100	0
70	-1.08499E-4
65	3.25497E-4
60	0.00105
55	0.00105
50	-1.08499E-4
45	5.42495E-4
40	0.00506
35	0.01331
30	0.01939
25	0.01599
20	0.00702
15	0.00362
10	0.0042
0	0.00242
-10	5.42495E-4
-20	-2.16998E-4
-30	0
-40	0
-50	4.49711E-18
-70	4.49711E-18
-100	0

ion energy 800eV
electron energy (eV)	SE EEDF(e-/ion/eV)
200	-9.62001E-5
170	-7.51563E-5
150	-1.50313E-5
120	1.2025E-4
110	3.24675E-4
100	5.77201E-4
95	8.65801E-4
90	0.00137
85	0.00137
80	8.65801E-4
75	0.00224
70	0.00628
65	0.01299
60	0.0215
55	0.02713
50	0.0272
45	0.02338
40	0.01696
35	0.0101
30	0.00584
25	0.00361
20	0.00317
15	0.00548
10	0.00559
0	0.00361
-10	0.00274
-20	0.00133
-30	-7.21501E-5
-40	-2.886E-4
-50	3.22974E-17
-70	-1.07658E-17
-100	0


ion energy 1000eV
electron energy (eV)	SE EEDF(e-/ion/eV)
200	-1.06448E-17
170	-1.3306E-17
150	-1.86285E-17
120	-1.06448E-17
110	-4.81541E-5
100	1.44462E-4
95	0.00112
90	0.00318
85	0.00703
80	0.01425
75	0.02112
70	0.02379
65	0.02295
60	0.02218
55	0.02193
50	0.01917
45	0.01387
40	0.00844
35	0.00465
30	0.0035
25	0.00401
20	0.00315
15	0.00135
10	0.00311
0	0.00681
-10	0.00616
-20	0.00218
-30	-1.92616E-4
-40	-9.63082E-5
-50	7.98363E-18
-70	7.98363E-18
-100	0