SE EEDF MEASUREMENTS
Same data as in figure 2
--Ar on Al--
1000eV
Electron energy (eV)	SE EEDF (e-/ion/eV)
150	-1.26984E-4
120	-1.34921E-4
110	-2.38095E-5
100	2.38095E-4
95	8.09524E-4
90	0.00162
85	0.00233
80	0.00243
75	0.00181
70	0.00133
65	0.001
60	4.7619E-4
55	2.85714E-4
50	4.28571E-4
45	0.001
40	0.00167
35	0.00167
30	0.001
25	2.38095E-4
20	3.80952E-4
15	0.00143
10	0.00167
0	0.00114
-10	7.61905E-4
-20	2.14286E-4
-30	-7.14286E-5
-40	-4.7619E-5
-50	-7.10543E-18
-70	-4.73695E-18
-100	-9.4739E-18

--Ar on Al2O3--
1000eV
Electron energy (eV)	SE EEDF (e-/ion/eV)
200	-1.06448E-17
170	-1.3306E-17
150	-1.86285E-17
120	-1.06448E-17
110	-4.81541E-5
100	1.44462E-4
95	0.00112
90	0.00318
85	0.00703
80	0.01425
75	0.02112
70	0.02379
65	0.02295
60	0.02218
55	0.02193
50	0.01917
45	0.01387
40	0.00844
35	0.00465
30	0.0035
25	0.00401
20	0.00315
15	0.00135
10	0.00311
0	0.00681
-10	0.00616
-20	0.00218
-30	-1.92616E-4
-40	-9.63082E-5
-50	7.98363E-18
-70	7.98363E-18
-100	0
-----------------------------------------------------
SE EEDF MODELING
EXTENDED HAGSTRUM MODEL
--Ar on Al--

ion energy 1000eV

electron energy (eV)	SE EEDF inside (e-/ion/eV)	SE EEDF outside (e-/ion/eV)	SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV
14.76667	0	0	0.00109
15.43333	0	0	0.00103
16.1	0	0	9.70745E-4
16.76667	0	0	9.16529E-4
17.43333	0	0	8.66881E-4
18.1	0	0	8.22221E-4
18.76667	0	0	7.83075E-4
19.43333	0	0	7.49144E-4
20.1	0	0	7.21166E-4
20.76667	0	0	6.99154E-4
21.43333	0	0	6.83229E-4
22.1	0	0	6.73383E-4
22.76667	0	0	6.69542E-4
23.43333	0	0	6.71567E-4
24.1	0	0	6.79261E-4
24.76667	0	0	6.92367E-4
25.43333	0	0	7.1058E-4
26.1	0	0	7.33544E-4
26.76667	1.0474E-5	3.76282E-6	7.60858E-4
27.43333	6.22554E-5	2.24894E-5	7.92084E-4
28.1	1.58242E-4	5.74683E-5	8.26748E-4
28.76667	2.99409E-4	1.09291E-4	8.64345E-4
29.43333	4.86713E-4	1.78533E-4	9.04341E-4
30.1	7.21103E-4	2.6576E-4	9.45961E-4
30.76667	0.001	3.71522E-4	9.87613E-4
31.43333	0.00133	4.96358E-4	0.00103
32.1	0.00172	6.40797E-4	0.00107
32.76667	0.00215	8.05357E-4	0.00111
33.43333	0.00263	9.90544E-4	0.00116
34.1	0.00317	0.0012	0.00119
34.76667	0.00376	0.00142	0.00123
35.43333	0.0044	0.00167	0.00127
36.1	0.0051	0.00195	0.0013
36.76667	0.00585	0.00224	0.00133
37.43333	0.00667	0.00256	0.00136
38.1	0.00751	0.0029	0.00138
38.76667	0.00803	0.00311	0.0014
39.43333	0.00833	0.00323	0.00141
40.1	0.00848	0.0033	0.00142
40.76667	0.00851	0.00332	0.00142
41.43333	0.00842	0.00329	0.00142
42.1	0.00823	0.00323	0.00141
42.76667	0.00795	0.00313	0.0014
43.43333	0.00758	0.00299	0.00138
44.1	0.00712	0.00281	0.00136
44.76667	0.00658	0.00261	0.00133
45.43333	0.00595	0.00236	0.0013
46.1	0.00524	0.00208	0.00127
46.76667	0.00444	0.00177	0.00123
47.43333	0.00357	0.00143	0.00119
48.1	0.00262	0.00105	0.00115
48.76666	0.00158	6.34633E-4	0.00111
49.43334	4.67738E-4	1.88087E-4	0.00106
50.1	0	0	0.00102
50.76666	0	0	9.77482E-4
51.43334	0	0	9.35215E-4
52.1	0	0	8.94441E-4
52.76666	0	0	8.55716E-4
53.43334	0	0	8.19578E-4
54.1	0	0	7.8654E-4
54.76666	0	0	7.57086E-4
55.43334	0	0	7.31665E-4
56.1	0	0	7.10688E-4
56.76666	0	0	6.94521E-4
57.43334	0	0	6.83478E-4
58.1	0	0	6.77828E-4
58.76666	0	0	6.77812E-4
59.43334	0	0	6.83488E-4
60.1	0	0	6.95045E-4
60.76666	0	0	7.12751E-4
61.43334	0	0	7.36395E-4
62.1	0	0	7.66275E-4
62.76666	0	0	8.02431E-4
63.43334	0	0	8.44001E-4
64.1	0	0	8.91486E-4
64.76666	0	0	9.44792E-4
65.43334	0	0	0.001
66.1	0	0	0.00106
66.76666	1.66733E-5	6.9746E-6	0.00113
67.43334	9.87354E-5	4.135E-5	0.0012
68.1	2.50052E-4	1.04841E-4	0.00128
68.76666	4.71435E-4	1.97884E-4	0.00135
69.43334	7.63693E-4	3.20913E-4	0.00143
70.1	0.00113	4.74354E-4	0.00151
70.76666	0.00156	6.58634E-4	0.00159
71.43334	0.00207	8.74173E-4	0.00167
72.1	0.00266	0.00112	0.00175
72.76666	0.00332	0.0014	0.00182
73.43334	0.00405	0.00171	0.0019
74.1	0.00486	0.00206	0.00197
74.76666	0.00575	0.00244	0.00203
75.43334	0.00671	0.00285	0.00209
76.1	0.00776	0.00329	0.00215
76.76666	0.00888	0.00377	0.0022
77.43334	0.01008	0.00429	0.00224
78.1	0.01134	0.00483	0.00227
78.76666	0.01209	0.00515	0.0023
79.43334	0.01251	0.00533	0.00232
80.1	0.0127	0.00542	0.00233
80.76666	0.01271	0.00543	0.00233
81.43334	0.01255	0.00536	0.00233
82.1	0.01224	0.00524	0.00231
82.76666	0.0118	0.00505	0.00229
83.43334	0.01122	0.00481	0.00225
84.1	0.01051	0.00451	0.00221
84.76666	0.00969	0.00416	0.00217
85.43334	0.00874	0.00376	0.00211
86.1	0.00768	0.0033	0.00205
86.76666	0.0065	0.0028	0.00198
87.43334	0.00521	0.00224	0.00191
88.1	0.00381	0.00164	0.00184
88.76666	0.0023	9.92034E-4	0.00176
89.43334	6.79224E-4	2.93061E-4	0.00167
90.1	0	0	0.00159
90.76666	0	0	0.0015
91.43334	0	0	0.00142
92.1	0	0	0.00133
92.76666	0	0	0.00124
93.43334	0	0	0.00116
94.1	0	0	0.00107
94.76666	0	0	9.93472E-4
95.43334	0	0	9.14795E-4
96.1	0	0	8.39108E-4
96.76666	0	0	7.66712E-4
97.43334	0	0	6.97845E-4
98.1	0	0	6.32687E-4
98.76666	0	0	5.71361E-4
99.43334	0	0	5.13936E-4
100.1	0	0	4.60435E-4
100.76666	0	0	4.10836E-4
101.43334	0	0	3.65074E-4
102.1	0	0	3.23053E-4
102.76666	0	0	2.84645E-4
103.43334	0	0	2.49697E-4
104.1	0	0	2.18038E-4
104.76666	0	0	1.8948E-4
105.43334	0	0	1.63825E-4
106.1	0	0	1.4087E-4
106.76666	0	0	1.20408E-4
107.43334	0	0	1.02231E-4
108.1	0	0	8.61414E-5
108.76666	0	0	7.2014E-5
109.43334	0	0	5.96978E-5
110.1	0	0	4.90309E-5
110.76666	0	0	3.9853E-5
111.43334	0	0	3.20104E-5
112.1	0	0	2.53587E-5
112.76667	0	0	1.97633E-5
113.43333	0	0	1.65179E-5
114.1	0	0	1.12592E-5
114.76667	0	0	8.13696E-6
115.43333	0	0	6.75033E-6
116.1	0	0	3.69812E-6
116.76667	0	0	2.22993E-6
117.43333	0	0	1.83827E-6
118.1	0	0	4.84046E-7
118.76667	0	0	1.05265E-7
119.43333	0	0	8.63754E-8
120.1	0	0	0
120.76667	0	0	0
121.43333	0	0	0
122.1	0	0	0
122.76667	0	0	0
123.43333	0	0	0
124.1	0	0	0
124.76667	0	0	0
125.43333	0	0	0
126.1	0	0	0
126.76667	0	0	0
127.43333	0	0	0
128.1	0	0	0
128.76667	0	0	0
129.43333	0	0	0
130.1	0	0	0
130.76667	0	0	0
131.43333	0	0	0
132.1	0	0	0
132.76667	0	0	0
133.43333	0	0	0
134.1	0	0	0
134.76667	0	0	0
135.43333	0	0	0
136.1	0	0	0
136.76667	0	0	0
137.43333	0	0	0
138.1	0	0	0
138.76667	0	0	0
139.43333	0	0	0
140.1	0	0	0
140.76667	0	0	0
141.43333	0	0	0
142.1	0	0	0
142.76667	0	0	0
143.43333	0	0	0
144.1	0	0	0
144.76667	0	0	0
145.43333	0	0	0
146.1	0	0	0
146.76667	0	0	0
147.43333	0	0	0
148.1	0	0	0
148.76667	0	0	0
149.43333	0	0	0
150.1	0	0	0
150.76667	0	0	0
151.43333	0	0	0
152.1	0	0	0
152.76667	0	0	0
153.43333	0	0	0
154.1	0	0	0
154.76667	0	0	0
155.43333	0	0	0
156.1	0	0	0
156.76667	0	0	0
157.43333	0	0	0
158.1	0	0	0
158.76667	0	0	0
159.43333	0	0	0
160.1	0	0	0
160.76667	0	0	0
161.43333	0	0	0
162.1	0	0	0
162.76667	0	0	0
163.43333	0	0	0
164.1	0	0	0
164.76667	0	0	0
165.43333	0	0	0
166.1	0	0	0
166.76667	0	0	0
167.43333	0	0	0
168.1	0	0	0
168.76667	0	0	0
169.43333	0	0	0
170.1	0	0	0
170.76667	0	0	0
171.43333	0	0	0
172.1	0	0	0
172.76667	0	0	0
173.43333	0	0	0
174.1	0	0	0
174.76667	0	0	0
175.43333	0	0	0
176.1	0	0	0
176.76667	0	0	0
177.43333	0	0	0
178.1	0	0	0
178.76667	0	0	0
179.43333	0	0	0
180.1	0	0	0
180.76667	0	0	0
181.43333	0	0	0
182.1	0	0	0
182.76667	0	0	0
183.43333	0	0	0
184.1	0	0	0


--Ar on Al2O3--

ion energy 1000eV
electron energy (eV)	SE EEDF inside (e-/ion/eV)	SE EEDF outside (e-/ion/eV)	SE EEDF outside (e-/ion/eV) after Gaussian convolution with width = 8eV
9.53333	0	0	0.00259
10.2	0	0	0.00241
10.86667	0	0	0.00223
11.53333	0	0	0.00206
12.2	0	0	0.00188
12.86667	0	0	0.00171
13.53333	0	0	0.00155
14.2	0	0	0.0014
14.86667	0	0	0.00126
15.53333	0	0	0.00113
16.2	0	0	0.00101
16.86667	0	0	9.15012E-4
17.53333	0	0	8.33975E-4
18.2	0	0	7.61268E-4
18.86667	0	0	7.08017E-4
19.53333	0	0	6.72607E-4
20.2	0	0	6.49305E-4
20.86667	0	0	6.43635E-4
21.53333	0	0	6.53389E-4
22.2	0	0	6.79164E-4
22.86667	0	0	7.21017E-4
23.53333	0	0	7.78737E-4
24.2	0	0	8.51269E-4
24.86667	0	0	9.3716E-4
25.53333	0	0	0.00104
26.2	0	0	0.00115
26.86667	0	0	0.00129
27.53333	0	0	0.00144
28.2	0	0	0.0016
28.86667	0	0	0.0018
29.53333	0	0	0.00199
30.2	0	0	0.00221
30.86667	0	0	0.00247
31.53333	1.34854E-4	5.29742E-5	0.00271
32.2	6.87932E-4	2.71154E-4	0.00297
32.86667	0.00168	6.63242E-4	0.00328
33.53333	0.00311	0.00123	0.00355
34.2	0.005	0.00199	0.00386
34.86667	0.00736	0.00294	0.0042
35.53333	0.01018	0.00408	0.00452
36.2	0.01349	0.00541	0.00487
36.86667	0.01729	0.00696	0.00523
37.53333	0.02159	0.00871	0.00561
38.2	0.02599	0.01051	0.006
38.86667	0.02793	0.01132	0.00642
39.53333	0.02841	0.01155	0.00686
40.2	0.02783	0.01134	0.00732
40.86667	0.02634	0.01075	0.00782
41.53333	0.02402	0.00983	0.00835
42.2	0.02092	0.00858	0.00891
42.86667	0.01708	0.00702	0.00952
43.53333	0.01252	0.00515	0.01014
44.2	0.00725	0.00299	0.01081
44.86667	0.00128	5.27775E-4	0.01155
45.53333	0	0	0.01227
46.2	0	0	0.01306
46.86667	0	0	0.01389
47.53333	6.20296E-4	2.58192E-4	0.0147
48.2	0.00316	0.00132	0.01556
48.86667	0.00768	0.00321	0.01644
49.53333	0.01423	0.00595	0.0173
50.2	0.02283	0.00956	0.01817
50.86667	0.03351	0.01406	0.01904
51.53333	0.0463	0.01946	0.01988
52.2	0.06124	0.02577	0.02071
52.86666	0.07836	0.03302	0.02151
53.53334	0.09768	0.04122	0.02228
54.2	0.1174	0.04961	0.02303
54.86666	0.12594	0.0533	0.02373
55.53334	0.12792	0.0542	0.0244
56.2	0.12511	0.05308	0.02502
56.86666	0.11822	0.05022	0.02561
57.53334	0.10765	0.04579	0.02615
58.2	0.09364	0.03988	0.02664
58.86666	0.07634	0.03255	0.0271
59.53334	0.05587	0.02385	0.02751
60.2	0.0323	0.0138	0.02787
60.86666	0.00568	0.00243	0.0282
61.53334	7.63341E-4	3.26925E-4	0.02847
62.2	0.00388	0.00166	0.0287
62.86666	0.00944	0.00405	0.02888
63.53334	0.01746	0.0075	0.02899
64.2	0.02798	0.01203	0.02906
64.86666	0.04102	0.01766	0.02906
65.53334	0.05663	0.02441	0.02899
66.2	0.07484	0.03228	0.02886
66.86666	0.09566	0.0413	0.02864
67.53334	0.11914	0.05149	0.02835
68.2	0.14307	0.06189	0.02796
68.86666	0.15335	0.06639	0.02749
69.53334	0.15562	0.06744	0.02693
70.2	0.15207	0.06596	0.02628
70.86666	0.14359	0.06233	0.02555
71.53334	0.13064	0.05676	0.02472
72.2	0.11355	0.04937	0.02382
72.86666	0.0925	0.04025	0.02284
73.53334	0.06764	0.02946	0.0218
74.2	0.03908	0.01703	0.0207
74.86666	0.00687	0.003	0.01956
75.53334	0	0	0.01837
76.2	0	0	0.01717
76.86666	0	0	0.01595
77.53334	0	0	0.01474
78.2	0	0	0.01354
78.86666	0	0	0.01236
79.53334	0	0	0.01122
80.2	0	0	0.01012
80.86666	0	0	0.00908
81.53334	0	0	0.0081
82.2	0	0	0.00718
82.86666	0	0	0.00633
83.53334	0	0	0.00555
84.2	0	0	0.00483
84.86666	0	0	0.00419
85.53334	0	0	0.00361
86.2	0	0	0.00309
86.86666	0	0	0.00262
87.53334	0	0	0.00221
88.2	0	0	0.00185
88.86666	0	0	0.00154
89.53334	0	0	0.00127
90.2	0	0	0.00103
90.86666	0	0	8.30738E-4
91.53334	0	0	6.57755E-4
92.2	0	0	5.10128E-4
92.86666	0	0	3.86785E-4
93.53334	0	0	2.85496E-4
94.2	0	0	2.03757E-4
94.86666	0	0	1.39123E-4
95.53334	0	0	8.93301E-5
96.2	0	0	5.23404E-5
96.86666	0	0	2.63576E-5
97.53334	0	0	9.82513E-6
98.2	0	0	1.4132E-6
98.86666	0	0	0
99.53334	0	0	0
100.2	0	0	0
100.86666	0	0	0
101.53334	0	0	0
102.2	0	0	0
102.86666	0	0	0
103.53334	0	0	0
104.2	0	0	0
104.86666	0	0	0
105.53334	0	0	0
106.2	0	0	0
106.86666	0	0	0
107.53334	0	0	0
108.2	0	0	0
108.86666	0	0	0
109.53334	0	0	0
110.2	0	0	0
110.86666	0	0	0
111.53334	0	0	0
112.2	0	0	0
112.86666	0	0	0
113.53334	0	0	0
114.2	0	0	0
114.86666	0	0	0
115.53334	0	0	0
116.2	0	0	0
116.86667	0	0	0
117.53333	0	0	0
118.2	0	0	0
118.86667	0	0	0
119.53333	0	0	0
120.2	0	0	0
120.86667	0	0	0
121.53333	0	0	0
122.2	0	0	0
122.86667	0	0	0
123.53333	0	0	0
124.2	0	0	0
124.86667	0	0	0
125.53333	0	0	0
126.2	0	0	0
126.86667	0	0	0
127.53333	0	0	0
128.2	0	0	0
128.86667	0	0	0
129.53333	0	0	0
130.2	0	0	0
130.86667	0	0	0
131.53333	0	0	0
132.2	0	0	0
132.86667	0	0	0
133.53333	0	0	0
134.2	0	0	0
134.86667	0	0	0
135.53333	0	0	0
136.2	0	0	0
136.86667	0	0	0
137.53333	0	0	0
138.2	0	0	0
138.86667	0	0	0
139.53333	0	0	0
140.2	0	0	0
140.86667	0	0	0
141.53333	0	0	0
142.2	0	0	0
142.86667	0	0	0
143.53333	0	0	0
144.2	0	0	0
144.86667	0	0	0
145.53333	0	0	0
146.2	0	0	0
146.86667	0	0	0
147.53333	0	0	0
148.2	0	0	0
148.86667	0	0	0
149.53333	0	0	0
150.2	0	0	0
150.86667	0	0	0
151.53333	0	0	0
152.2	0	0	0
152.86667	0	0	0
153.53333	0	0	0
154.2	0	0	0
154.86667	0	0	0
155.53333	0	0	0
156.2	0	0	0
156.86667	0	0	0
157.53333	0	0	0
158.2	0	0	0
158.86667	0	0	0
159.53333	0	0	0
160.2	0	0	0
160.86667	0	0	0
161.53333	0	0	0
162.2	0	0	0
162.86667	0	0	0
163.53333	0	0	0
164.2	0	0	0
164.86667	0	0	0
165.53333	0	0	0
166.2	0	0	0
166.86667	0	0	0
167.53333	0	0	0
168.2	0	0	0
168.86667	0	0	0
169.53333	0	0	0
170.2	0	0	0
170.86667	0	0	0
171.53333	0	0	0
172.2	0	0	0
172.86667	0	0	0
173.53333	0	0	0
174.2	0	0	0
174.86667	0	0	0
175.53333	0	0	0
176.2	0	0	0
176.86667	0	0	0
177.53333	0	0	0
178.2	0	0	0
178.86667	0	0	0
179.53333	0	0	0
180.2	0	0	0
180.86667	0	0	0
181.53333	0	0	0
182.2	0	0	0
182.86667	0	0	0
183.53333	0	0	0
184.2	0	0	0
184.86667	0	0	0
185.53333	0	0	0
186.2	0	0	0
186.86667	0	0	0
187.53333	0	0	0
188.2	0	0	0
------------------------------------------------------
SE EEDF MODELING
ORIGINAL HAGSTRUM MODEL

--Ar on metallic Al--
electron energy (eV)	SE EEDF inside (e-/ion/eV)	SE EEDF outside (e-/ion/eV)
-10.56667	0	0
-9.9	0	0
-9.23333	0	0
-8.56667	0	0
-7.9	0	0
-7.23333	0	0
-6.56667	0	0
-5.9	0	0
-5.23333	0	0
-4.56667	0	0
-3.9	0.12171	0
-3.23333	0.12662	0
-2.56667	0.12961	0
-1.9	0.1308	0
-1.23333	0.13024	0
-0.56667	0.12796	0
0.1	0.12398	7.68886E-4
0.76667	0.11829	0.00515
1.43333	0.11089	0.00831
2.1	0.10175	0.01037
2.76667	0.09087	0.01138
3.43333	0.07823	0.01139
4.1	0.0638	0.01043
4.76667	0.04756	0.00854
5.43333	0.02949	0.00572
6.1	0.00957	0.00198
6.76667	0	0
7.43333	0	0
8.1	0	0
8.76667	0	0
9.43333	0	0
10.1	0	0
10.76667	0	0
11.43333	0	0
12.1	0	0
12.76667	0	0
13.43333	0	0
14.1	0	0
14.76667	0	0