The excitation and dissociation of CO2 admixed to argon and helium atmospheric pressure radio frequency plasmas is analyzed. The absorbed plasma power is determined by voltage and current probe measurements and the excitation and dissociation of CO2 and CO by transmission mode Fourier-transform infrared spectroscopy (FTIR). It is shown that the vibrational temperatures of CO2 and CO are significantly higher in an argon compared to a helium plasma. The rotational temperatures remain in both cases close to room temperature. The conversion efficiency, expressed as a critical plasma power to reach almost complete depletion, is four times higher in the argon case. This is explained by the lower threshold for the generation of energetic particles (electrons or metastables) in argon as the main reactive collision partner, promoting excitation and dissociation of CO2, by the less efficient quenching of vibrational excited states of CO and CO2 by argon compared to helium and by a possible contribution of more energetic electrons in an argon plasma compared to helium.
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|Plasma Source Name|
|Plasma Source Application|
|Plasma Source Specification|
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plasma volume of 40 mm x 1 mm x 14 mm, symmetric power input, 13.56 MHz
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varying He/Ar mixture 250 sccm total flow. admixture of CO2 up to 1 %
English (United States)
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Achim von Keudell
Data and Resources
- Conversion of CO2 in Ar plasmasxlsx
CO2 conversion in an RF plasma jet from Argon. Temperatures of CO2 and CO....
- Conversion of CO2 in He/Ar RF plasmasxlsx
CO2 conversion in RF plasmas from Ar/He gas mixtures. Temperatures of CO2...
- Conversion of CO2 in He RF plasmasxlsx
CO2 conversion in He RF plasmas. Temperatures of CO2 and CO.
- Conversion CO2 in He RF Plasma. Variation of Position Along the Plasma Flow.xlsx
CO2 conversion in He RF Plasma. Variation of Position, Temperature of CO2...