The powered electrode is located at x = 0, while the grounded electrode is at x = 1 mm. The concentration of the N2 admixture is 0.05%. The columns show data for different peak-to-peak values of the driving ‘peaks’-voltage waveform composed of N = 4 consecutive harmonics of the base frequency f_0 = 13.56 MHz.
Experimental data are marked as exp
Simulation data are marked as sim
x[mm]
(Figure8a-8d): exp Helium metastable densities [cm^{-3}]
(Figure8e-8h): sim He metastable densities [cm^{-3}]
(Figure8i-8l): sim averaged Helium metastable densities [cm^{-3}]
(Figure8m-8p): sim Source [cm^{-3} s^{-1}] Singlets and Triplets
(Figure8r-8u): sim exc. Rate [cm^{-3} s^{-1}]
Peak-to-peak Voltage:
350V: a, e, i, m, r
400V: b, f, j, n, s
450V: c, g, k, o, t
500V: d, h, l, p, u