Normalized spatio-temporal plots of the (singlet + triplet) metastable source distribution (a)–(c) and the electron impact excitation rate from the ground state into the He-I (3s)3S1 level (d)–(f), obtained from PIC/MCC simulations for different N_2 admixture concentrations (columns). The positions of the sheath edges are shown as solid white lines. The base frequency is = 13.56 MHz, N = 4, and φpp = 500 V.
Experimental data are marked as exp
Simulation data are marked as sim
x [t/TRf] , y[mm]
(Figure12a-12c): Sim Metastable source [a. u.]
(Figure12d-12f): Sim Exc. Rate [a. u.]
(Figure12a_12d_Sheath to Figure12c_12f_Sheath): Sim sheath edges of the plasma. These sheaths are the same for each corresponding metastable source and Exc. rate