The powered electrode is located at x = 0, while the grounded electrode is at x = 1 mm. The base frequency is = 13.56 MHz, the number of consecutive harmonics is kept constant at N = 4, and φpp = 500 V. The columns show data for different values of the nitrogen admixture concentration.
Experimental data are marked as exp
Simulation data are marked as sim
x[mm]
(Figure8a-8d): exp Helium metastable densities [cm^{-3}]
(Figure8e-8h): sim He metastable densities [cm^{-3}]
(Figure8i-8l): sim averaged Helium metastable densities [cm^{-3}]
(Figure8m-8p): sim Source [cm^{-3} s^{-1}] Singlets and Triplets
(Figure8r-8u): sim exc. Rate [cm^{-3} s^{-1}]
Nitrogen admixture:
a, e, i, m, r: 0.05% nitrogen admixture
b, f, j, n, s: 0.1% nitrogen admixture
c, g, k, o, t: 0.2% nitrogen admixture
d, h, l, p, u: 0.4% nitrogen admixture