Numerous studies have shown that dielectric barrier discharge (DBD) and DBD-like plasma jets interact with a treated surface in a complex manner. Eroded traces after treatment cannot be explained by conventional plasma-surface interaction theory....
The plasma-mediated decomposition of volatile organic compounds has previously been investigated in the gas phase with metal oxides as heterogeneous catalysts. While the reactive species in plasma itself are well investigated, very little is...
This work utilizes 1d3v Particle-in-Cell/Monte Carlo Collisions (PIC/MCC) simulations of a symmetric discharge in the low-pressure regime with the inclusion of realistic electron-surface interactions for silicon dioxide. A diagnostic framework is...
Micro cavity plasma arrays have numerous applications, such as the treatment of volatile organic compounds (VOCs) or the generation of new species. In recent years, the focus has also shifted to plasma catalysis, in which catalytic surfaces are...
The unipolar pulsed-plasma electrolytic oxidation (PEO) of aluminum has been replaced by bipolar pulsed methods that use a so-called 'soft-sparking' mode. This method results in an effective reduction of intense microdischarges, which are...
New precursor chemistries for the atomic layer deposition (ALD) of aluminium oxide are reported as potential alternatives to the pyrophoric trimethylaluminium (TMA) which is to date a widely used Al precursor. Combining the high reactivity of...
Luminescent erbium-based inorganic–organic hybrid materials play an important role in many frontier nano-sized applications, such as amplifiers, detectors and OLEDs. Here, we demonstrate the possibility to fabricate high-quality thin films...
A bottom-up process from precursor development for tin to plasma-enhanced atomic layer deposition (PEALD) for tin(IV) oxide and its successful implementation in a working thin-film transistor device is reported. PEALD of tin(IV) oxide thin films...
A study on the plasma-enhanced atomic layer deposition of amorphous inorganic oxides SiO2 and Al2O3 on polypropylene (PP) was carried out with respect to growth taking place at the interface of the polymer substrate and the thin film employing in...
