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Magnetically induced formation and disruption of striations in capacitively coupled radio-frequency CF4 plasmas

The influence of externally applied homogeneous transverse magnetic fields of up to 200 G on self-organized striations in capacitively coupled radio-frequency CF4 plasmas is investigated using kinetic simulations. The striations are known to originate from a resonance between the applied radio-frequency and the eigenfrequency of the ion–ion plasma, the magnetic field is found to affect the striations indirectly through its impact on electron dynamics as ions do not get magnetized within the range of magnetic fields covered. Depending on the discharge conditions, increasing the magnetic field can either switch striations on or off and, in this way, strongly affect the spatial electron energy distribution function as well as the generation of process relevant charged and neutral species. We demonstrate that at some discharge conditions where striations
form in the absence of a magnetic field, applying a moderate B-field can lead to the suppression of striations near the discharge center as a result of enhanced electron power absorption and a corresponding increase in electron density, enabling electrons to neutralize the space charge caused by the ion oscillations. We also illustrate the opposite effect that can occur at some other operating conditions, where the plasma operates close to the striation regime, but striations are absent due to insufficient ion densities, the magnetic field enhances the ion density and amplifies the local space charge formation, which can no longer be balanced by electrons. As a result, striations appear, inducing a transition from the drift ambipolar to a striation/magnetized drift ambipolar hybrid mode.

FieldValue
Publisher
Authors
Release Date
2026-04-11
Identifier
c3e0ca9c-b990-4b9d-b9d1-cb7f17e50156
Permanent Identifier (URI)
Is supplementing
Plasma Source Name
Plasma Source Application
Plasma Source Specification
Language
English
License
Plasma Medium Name
Contact Name
Li Wang
Contact Email
Public Access Level
Public
Plasma Diagnostic Name
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Project
Subproject
Project Contact Name: 
Li Wang and Julian Schulze