Space and time averaged values of the helium metastable density and the electron impact dissociation rate of N_2 molecules obtained from the PIC/MCC simulations for different numbers of driving harmonics, N, and molecular nitrogen admixtures for ‘peaks’-voltage waveform with a peak-to-peak voltage of 400V. The powered electrode is located at x=0, while the grounded electrode is at x=1mm. The base frequency is f=13.56MHz
Experimental data are marked as exp
Simulation data are marked as sim
x [mm] , y[m^{-3}s^{-1}]
(Figure8_Diss): sim electron impact diss. Rate of N2 for N = 1, 2 and 4 and 1-10 sccm N_2 admixture
(Figure8_He): sim He* density for N = 1,2 and 4 and 1-10 sccm N_2 admixture