The base frequency and the peak-to-peak voltage of the driving voltage waveform are kept constant at 13.56MHz and 400V, respectively. The magenta stars in the left plot represent exemplary values of the DC self-bias values obtained from the analytical model for N = 4 at N_2-ﬂows of 1sccm and 10 sccm, respectively.

Experimental data are marked as exp

Simulation data are marked as sim

x [sccm] , y[V]

(Figure3a): exp DC-Selfbias for different harmonics and N2-ﬂows (V = Valley-function; P = Peaks-function) Left picture

(Figure3b): sim DC-Selfbias for different harmonics and N2-ﬂows (V = Valley-function; P = Peaks-function) Left Picture

x[N], y[V]

(Figure3c): sim and exp DC-Selfbias for different harmonics and constant N2-ﬂow [1sccm] (V = Valley-function; P = Peaks-function) Right picture

*6* files in this archive

- Figure3a.csv
- __MACOSX/._Figure3a.csv
- Figure3b.csv
- __MACOSX/._Figure3b.csv
- Figure3c.csv
- __MACOSX/._Figure3c.csv