The base frequency and the peak-to-peak voltage of the driving voltage waveform are kept constant at 13.56MHz and 400V, respectively. The magenta stars in the left plot represent exemplary values of the DC self-bias values obtained from the analytical model for N = 4 at N_2-flows of 1sccm and 10 sccm, respectively.
Experimental data are marked as exp
Simulation data are marked as sim
x [sccm] , y[V]
(Figure3a): exp DC-Selfbias for different harmonics and N2-flows (V = Valley-function; P = Peaks-function) Left picture
(Figure3b): sim DC-Selfbias for different harmonics and N2-flows (V = Valley-function; P = Peaks-function) Left Picture
x[N], y[V]
(Figure3c): sim and exp DC-Selfbias for different harmonics and constant N2-flow [1sccm] (V = Valley-function; P = Peaks-function) Right picture