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Funding Agency
Project
Datasets
1026 results
Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge
AEPT
The kinetics of excited atoms in a low-pressure argon capacitively coupled plasma source are investigated by an extended particle-in-cell/Monte Carlo Collisions simulation code coupled with a diffusion-reaction-radiation code which considers a...
- 2x zip
Experimental data
AEPT
- Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge
Simulation data
AEPT
- Metastable argon atom kinetics in a low-pressure capacitively coupled radio frequency discharge