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Figure 4

Vertical velocity component for a total gas flow of a) 250sccm and b) 2000sccm as a function of the vertical position for both plasma-on ("on") and plasma-off ("off") conditions. A basic one-dimensional steady laminar flow model can explain the profiles by an increase in temperature, but shows slight deviations at the edges.

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resource typefile upload
timestampMay 06, 2026