Figure 4
Vertical velocity component for a total gas flow of a) 250sccm and b) 2000sccm as a function of the vertical position for both plasma-on ("on") and plasma-off ("off") conditions.
velocity
Figure 3
Streamline representation of the time-averaged flow field for a) the deactivated array and b) the operating array for an applied gas flow rate of 250sccm.
Figure 6
emporal evolution of the vertical velocity component spatially averaged in the gas domain directly above the cavities as a function of operating time and external gas flow rate.