Secondary electron emission from magnetron targets
Paper Secondary electron emission from magnetron targets, published in IOP PSST 2023. DOI 10.1088/1361-6595/acd57e
Paper Secondary electron emission from magnetron targets, published in IOP PSST 2023. DOI 10.1088/1361-6595/acd57e
NO synthesis using plasma catalysis is analyzed in a parallel-plate atmospheric pressure RF plasma from N$_2$/O$_2$ admixed to helium exposed to Fe and Pt catalysts on a SiO$_2$ support. The NO$_x$ species are measured by Fourier-transform...
Dielectric barrier discharges (DBD) are often used for gas conversion, such as carbon dioxide splitting, volatile organic compound removal or ozone generation. Due to the tiny plasma filaments in DBD discharges, efficient mixing of the gas flow...
Nanosecond plasmas in liquids are being used for water treatment, electrolysis or biomedical applications. The exact nature of these very dynamic plasmas and most important their ignition physics are strongly debated. The ignition itself may be...
High power impulse magnetron sputtering (HiPIMS) plasmas produce a very energetic growth flux for the synthesis of thin films with superior properties. High power densities in the range of a few kW/cm2 are applied to a metal target electrode in...