Data Figure 3 and 4: Secondary electron emission coefficients from experiment and literature
EP2
- Ion-induced secondary electron emission of oxidized nickel and copper studied in beam experiments
Ion-induced secondary electron emission at a target surface is an essential mechanism for laboratory plasmas, i.e. magnetron sputtering discharges. Electron emission, however, is strongly affected by the target condition itself such as oxidation...
Paper Secondary electron emission from magnetron targets, published in IOP PSST 2023. DOI 10.1088/1361-6595/acd57e