figure_12_r+_0.01
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
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Authors
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Resource Quantity
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Funding Agency
Project
Datasets
975 results
figure_13_ionflux_0.05
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_12_r+_0.10
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_15_rDO_0.20
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_11_O_3s_558
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_13_ionflux_0.01
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_15_rDO_0.05
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_12_r+_0.05
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_14_oxygendiffusion_0.10
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_14_oxygendiffusion_0.01
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas