Electronegativity effects on plasma dynamics in He/O2 RF microplasma jets at atmospheric pressure
AEPT
- Electronegativity effects on plasma dynamics in He/O2 RF microplasma jets at atmospheric
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Electronegativity effects on plasma dynamics in He/O2 RF microplasma jets at atmospheric
AEPT
This work investigates the transitions between ohmic mode and Penning-Gamma mode in a capacitively coupled radio frequency micro atmospheric pressure plasma jets operated in He/O2 mixtures by comparing phase-resolved optical emission spectroscopy...
Electron and gas temperature-driven chemistry during microdischarges formed in water vapor bubbles
AEPT
- Electron and gas temperature-driven chemistry during microdischarges formed in water vapor bubbles
Electron and gas temperature-driven chemistry during microdischarges formed in water vapor bubbles
AEPT
Microdischarges formed in bubbles immersed in liquids are of interest for materials synthesis and chemical conversion applications in the frame of plasma-driven electrochemistry. A key challenge associated with controlling such processes is the...
Multi-diagnostic characterization of inductively coupled discharges with tailored waveform substrate bias for precise control of plasma etching
AEPT
Precise control of ion energy distribution functions (IEDF) is crucial for selectivity as well as control over sputter rate and substrate damage in nanoscale plasma processes. In this work, a low frequency (100 kHz) tailored pulse-wave-shaped bias...
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AEPT
- Multi-diagnostic characterization of inductively coupled discharges with tailored waveform substrate bias for precise control of plasma etching
Fig_7_b_spectr_Jet_CB_simul
AEPT
- Modifications of an electrolytic aluminum oxide film under the treatment with microdischarges during plasma electrolytic oxidation, a self-organized dielectric barrier discharge (DBD) and a DBD-like plasma jet
Fig_7_b_spectr_Jet_CB_exp
AEPT
- Modifications of an electrolytic aluminum oxide film under the treatment with microdischarges during plasma electrolytic oxidation, a self-organized dielectric barrier discharge (DBD) and a DBD-like plasma jet
Fig_7_b_spectr_Jet
AEPT
- Modifications of an electrolytic aluminum oxide film under the treatment with microdischarges during plasma electrolytic oxidation, a self-organized dielectric barrier discharge (DBD) and a DBD-like plasma jet
Fig_7_b_spectr_DBD_CB_simul
AEPT
- Modifications of an electrolytic aluminum oxide film under the treatment with microdischarges during plasma electrolytic oxidation, a self-organized dielectric barrier discharge (DBD) and a DBD-like plasma jet