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The group "Allgemeine Elektrotechnik und Plasmatechnik" at the faculty for engineering and information science.
With the increasing demands towards large area plasma etching and deposition, the radial uniformity of capacitively coupled plasmas (CCPs) becomes one of the key factors that determine process performance in industrial applications. However,...
Capacitively coupled micro atmospheric pressure plasma jets (µAPPJs) are important tools for the generation of radicals at room temperature for various applications. Voltage Waveform Tailoring (VWT), which is based on the simultaneous use of a set...
The propagation mechanisms of plasma streamers have been observed and investigated in a surface dielectric barrier discharge (SDBD) using 2D particle in cell simulations. The investigations are carried out under a simulated air mixture, 80% N2...
A volume and a twin surface dielectric barrier discharge (VDBD and SDBD) are generated in different nitrogen–oxygen mixtures at atmospheric pressure by applying damped sinusoidal voltage waveforms with oscillation periods in the microsecond time...
Experiments are performed to assess the inactivation of Bacillus subtilis spores using a non-thermal atmospheric-pressure dielectric barrier discharge. The plasma source used in this study is mounted inside a vacuum vessel and operated in...
Microdischarges occurring during plasma electrolytic oxidation are the main mechanism promoting oxide growth compared to classical anodization. When the dissipated energy by microdischarges during the coating process gets too large, high-...
A new computationally assisted diagnostic to measure NO densities in atmospheric-pressure microplasmas by Optical Emission Spectroscopy (OES) is developed and validated against absorption spectroscopy in a volume Dielectric Barrier Discharge (DBD...
The electron power absorption dynamics in radio frequency driven micro atmospheric pressure capacitive plasma jets are studied based on experimental phase resolved optical emission spectroscopy (PROES) and computational (PIC/MCC) simulations. The...
Atmospheric pressure capacitively coupled radio frequency discharges operated in He/N2 mixtures and driven by tailored voltage waveforms are investigated experimentally using a COST microplasma reference jet and by means of kinetic simulations as...
Spatially resolved tunable diode-laser absorption measurements of the absolute densities of He-I (23S1) metastables in a micro atmospheric pressure plasma jet operated in He/N_2 and driven by ‘peaks’- and ‘valleys’-type tailored voltage waveforms...
