EP2

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Control of the chemistry of a humidified He RF atmospheric pressure plasma jet by pulse modulation

EP2,PIP

Pulse modulation of an RF-driven atmospheric pressure plasma jets (APPJs) can be used to control the production of short-lived and long-lived species. This was applied for the production of H2O2 by a humidified He APPJ operating at 13.56 MHz. In...

Velocity distribution of metal ions in the target region of HiPIMS: the role of Coulomb collisions

EP2

Plasma Modeling and Simulation

Plasma for Materials / Surfaces

High power impulse magnetron sputtering (HiPIMS) discharges have become an important tool for the deposition of thin, hard coatings. Such discharges are operated at a very low working gas pressure in the order of 1 Pa. Therefore, elastic...

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EP2

Control of the chemistry of a humidified He RF atmospheric pressure plasma jet by pulse modulation

Velocity distribution of metal ions in the target region of HiPIMS: the role of Coulomb collisions