High power impulse magnetron sputtering (HiPIMS) discharges have become an important tool for the deposition of thin, hard coatings. Such discharges are operated at a very low working gas pressure in the order of 1 Pa. Therefore, elastic collisions between ions and other heavy particles are often calculated to occur with low frequency, using the hard sphere approximation. However, inside the magnetic trap region of the discharge, a very dense plasma is created and Coulomb collisions become the dominant collision process for ions. In this article, we show that Coulomb collisions are a necessary part of a complete description of ion movement in the magnetic trap region of HiPIMS. To this end, the velocity distribution function (VDF) of chromium and titanium ions is measured using high-resolution optical emission spectroscopy. The VDF of those ions is then described using a simple simulation which employs a direct simulation Monte Carlo scheme. The simulation describes the self-relaxation of the VDF that is initially a Thompson distribution as being created during the sputtering process. Measurement positions inside the discharge are matched to the simulation results choosing an appropriate relaxation time. In this fashion, excellent agreement between simulation and measurement is obtained. We find, that the distribution quickly becomes mostly Maxwellian with a temperature of 9 eV for titanium ions and 4.5 eV in the case of chromium ions. Only the high energy tail of the VDF retains the shape of the initial Thompson distribution. The observed high temperature is explained with an energy redistribution from the highly energetic Thompson distribution into an partly-thermalized Maxwell-like distribution. Finally, the temperature resulting from this energy redistribution is calculated using a simple analytical model which shows good agreement with the measurements.
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Release Date | 2020-11-11 |
Identifier | 1974a45a-224b-45ca-99e7-ee5dab657770 |
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Plasma Source Properties | Power Supply: TRUMPF Hüttinger TruPlasma Highpulse 4002 in voltage control mode. Connected via an inductance between power supply and magnetron.
Magnetron: Thin Film Consulting IX2U for round 50 mm targets
Titanium discharge: voltage: 590 V, peak current: 50 A, frequency: 40 Hz, pulse length: 100 µs
Chromium discharge: voltage: 800 V, peak current: 36 A, frequency: 60 Hz, pulse length: 150 µs
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Language | English (United States) |
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Plasma Medium Properties | gas flow rate: 40 sccm, pressure: 0.5 Pa |
Plasma Target Name | |
Contact Name | Held, Julian |
Plasma Target Properties | round sputter target: 50 mm diameter, 3 mm thickness |
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Plasma Diagnostic Properties | OES Measurement:
Zeiss PGS 2, 1300 lines/mm grating, third diffraction order, camera as detector (Andor iStar DH320T-25U-A3), measuring Ti II 453.396 nm or Cr II 455.864 nm
Measurements performed parallel to the target surface for different distances between z=1 mm and z=18 mm. Data acquired from the last 10 µs of the discharge pulse. Emission lines were deconvolved to remove the instrumental profile and obtain the VDF.
DSMC model:
Particles were created following a Thompson distribution. The relaxation of this velocity distribution is then followed in time as particles collide with each other via Coulomb collisions. The ion density is assumed to be 1e20 m^-3. |
Public Access Level | Public |
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Data and Resources
- Simulated velocity distribution functions for chromium (m=52amu) and titanium (m=48amu), self-relaxing from a Thompson to a Maxwell distributionzip
VDF starts with a Thompson distribution of particles sputtered from the x,y...
Download - Width (FWHM) of the measured target parallel chromium ion VDFs as a function of target distancetxt
Column 1: target distance in mm
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Column 2: mean width (FWHM) of the... - Width (FWHM) of the measured target parallel titanium ion VDFs as a function of target distancetxt
Column 1: target distance in mm
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Column 2: mean width (FWHM) of the... - Measured VDF for chromium and titanium ionszip
Velocity distribution function (VDF) for chromium and titanium ions in the...
Download - Measured optical emission spectra for the chromium and titanium dischargezip
Measurements performed parallel to the target surface, at different...
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