Secondary electron emission from magnetron targets
EP2
Paper Secondary electron emission from magnetron targets, published in IOP PSST 2023. DOI 10.1088/1361-6595/acd57e
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Paper Secondary electron emission from magnetron targets, published in IOP PSST 2023. DOI 10.1088/1361-6595/acd57e
The in-plasma-catalytic synthesis of ammonia from nitrogen and hydrogen admixed to a helium RF plasma is studied with infrared absorption spectroscopy, optical emission spectroscopy, and through chemical kinetics modeling. Sandblasted glass is...