An easy-to-implement technique for measuring the dissipated plasma power of RF-excited plasmas at a frequency of 13.56 MHz is presented in this work. Specifically, the AD8302 phase detection board is used to measure the phase difference between voltage and current signals of the COST reference plasma jet. The system was characterised and power measurements were successfully carried out. Power curves of the COST-jet operated in pure helium and helium with 0.1 % of oxygen were well reproduced using the phase detection board. The current measurements were not disturbed by the addition of the circuit board and the ignition process as well as mode transition of the plasma are remarkably apparent in the phase measurements of the phase detection board. This work provides the basis for how the AD8302 phase detection board can be used for power measurements of RF-excited plasmas and what requires careful attention. This work is of particular interest for research groups, that would like to work with RF-driven plasmas, like the COST-jet, but are not able to perform power measurements involving fast and expensive oscilloscopes. However, the dissipated plasma power is the most important parameter when comparing different plasma sources or even comparing results produced by the same plasma but operated under different conditions. The measurement technique using the AD8302 phase detection board is easy to implement, requires no expensive oscilloscopes, and can be carried out in almost any laboratory that uses RF-driven plasma jets. Nevertheless, this method is only suitable for symmetrical waveforms and may lead to errors in the case of asymmetrical voltage and current waveforms. Care is required here, and proper calibration and a preliminary check of the waveforms must be carried out.
| Field | Value |
|---|---|
| Publisher | |
| Authors | |
| Release Date | 2026-04-24 |
| Identifier | 5723328f-50f5-43dd-9a82-ab56539fc6a8 |
| Permanent Identifier (URI) | |
| Is supplementing | |
| Plasma Source Name | |
| Plasma Source Application | |
| Plasma Source Specification | |
| Plasma Source Properties | The COST-jet was operated at a sinusoidal waveform at 13.56 MHz. Internal resonance coupling was realised using a matching coil and a tunable capacitor, amplifying the applied voltage by a factor of 30. Thus, no external tuning or matching network was needed. |
| Plasma Source Procedure | Plasma source was heated up for at least 30 minutes prior to the measurements. |
| License | |
| Plasma Medium Name | |
| Plasma Medium Properties | 1 slm He feed gas with the addition of 0% or 0.1% of O2 |
| Plasma Target Name | |
| Contact Name | Steffen Schüttler |
| Contact Email | |
| Plasma Diagnostic Properties | Power measurements were performed by the classical power detection using a fast oscilloscope and a new technique by using the AD8302 phase detection board. |
| Public Access Level | Public |
| Funding Agency | |
| Project | |
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Data and Resources
- figure 2 (a) calibration curves same cable lengthstxt
Calibration curves of the phase detection board (three boards were tested)...
Download - figure 2 (b) calibration curves different cable lengthtxt
Calibration curves of the phase detection board (three boards were tested)...
Download - figure 3 (a) power curves Hetxt
Power curves of the COST-jet measured by the classical power detection and...
Download - figure 3 (b) power curves He+O2txt
Power curves of the COST-jet measured by the classical power detection and...
Download - figure 4 (a) current curves Hetxt
Current as a function of applied voltage of the COST-jet measured by the...
Download - figure 4 (b) current cuves He+O2txt
Current as a function of applied voltage of the COST-jet measured by the...
Download - figure 5 (a) phase shift curves Hetxt
Phase shift as a function of applied voltage of the COST-jet measured by the...
Download - figure 5 (b) phase shift curves He+O2txt
Phase shift as a function of applied voltage of the COST-jet measured by the...
Download - figures SI 1 (a)txt
Output voltage of the phase detection board as a function of ffrequency of...
Download - figures SI 1 (b)txt
Output voltage of the phase detection board as a function of varying ratio...
Download - figure SI 2txt
Detailed calibration curve in the range of ±15◦ phase shift shown by output...
Download - figures SI 3txt
Determination of the reference phase shift of the system measured by three...
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