Secondary electron emission from magnetron targets
EP2
Paper Secondary electron emission from magnetron targets, published in IOP PSST 2023. DOI 10.1088/1361-6595/acd57e
Paper Secondary electron emission from magnetron targets, published in IOP PSST 2023. DOI 10.1088/1361-6595/acd57e
Even for processes with only a few gas species involved the detailed description of plasma-assisted conversion processes in gas mixtures requires a large amount of processes to be taken into account and a large number of neutral and charged...