Simulated electric field magnitude of microwave plasma torch
EP2
Magnitude of the electric field of the microwave plasma torch simulated with ansys HFSS
- 2x gif
Magnitude of the electric field of the microwave plasma torch simulated with ansys HFSS
Ion-induced secondary electron emission at a target surface is an essential mechanism for laboratory plasmas, i.e. magnetron sputtering discharges. Electron emission, however, is strongly affected by the target condition itself such as oxidation...