Measured and modeled 2d resolved atomic oxygen density for different admixtures. The cavities are located at z = 0mm. Contour lines indicate exemplary densities for the comparability of model and experiment. Conditions: 1slm total gas flow (He+O2); 700V amplitude; d = 200µm (left) / 150µm (right) cavity diameter; z-step = 50µm; gate time = 30ns; total exposure time = 60s.

EXP resolution: y: 1020 pixel, dy = 13µm, z: 46 pixel, dz = 50µm.
Model resolution: y: 501 pixel, dy = 13.247µm, z: 100 pixel, dz = 5.079µm.