Skip to main content
Research Data Repository
Research Department Plasmas with Complex Interactions
Search
Toggle navigation
Datasets
Topics
Plasma Science Fundamentals
Plasma Modeling and Simulation
Plasma Chemical Processes
Plasma in Liquids
Plasma Medicine
Plasma for Materials / Surfaces
Groups
Projects
Info
Plasma Repositories on the Web
Contact
About
Log in
Home
Home
Datasets
An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
Primary tabs
View published
(active tab)
Back to dataset
An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
Web Page
Resources
An efficient PE-ALD process for TiO2 thin films employing a new Ti-precursor
