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Here we present a method for the operando determination of absolute absorbed power in an RF atmospheric pressure helium plasma discharge using miniaturized probes. A detailed error analysis demonstrates the reliability of the measured power values. With the help of a global model, the sheath width and electron density (4 × 1016^(–11) × 1016 m^(−3)) are derived from these power measurements and compared to literature. The results and thus the validity of the electrical model are confirmed by a second, independent characterization method using optical emission spectroscopy and time-averaged imaging.
| Field | Value |
|---|---|
| Publisher | |
| Authors | |
| Release Date | 2021-01-07 |
| Identifier | 44b03ca0-ea6b-48ee-bab5-b7d53e0b1c0a |
| Permanent Identifier (DOI) | |
| Permanent Identifier (URI) | |
| Is supplementing | |
| Plasma Source Name | |
| Plasma Source Specification | |
| Plasma Source Properties | Power 0-2 W |
| Language | English (United States) |
| License | |
| Plasma Medium Name | |
| Plasma Medium Properties | gas flow rate 1000 sccm Helium |
| Contact Name | Golda, Judith |
| Contact Email | |
| Plasma Diagnostic Properties | Echelle spectrometer, photographs, current/voltage measurements |
| Public Access Level | Public |
| Plasma Diagnostic Name | |
| Funding Agency | |
| Project | |
| Subproject |
Data and Resources
- Figure 6btxt
Plasma reactance of helium discharge as a function of the dissipated power (...
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Project Contact Name:
Judith Golda