The μ-APPJ is a well-investigated atmospheric pressure RF plasma jet. Up to now, it has mainly been operated using helium as feed gas due to stability restrictions. However, the COST-Jet design including precise electrical probes now offers the stability and reproducibility to create equi-operational plasmas in helium as well as in argon. In this publication, we compare fundamental plasma parameters and physical processes inside the COST reference microplasma jet, a capacitively coupled RF atmospheric pressure plasma jet, under operation in argon and in helium. Differences already observable by the naked eye are reflected in differences in the power-voltage characteristic for both gases. Using an electrical model and a power balance, we calculated the electron density and temperature at 0.6 W to be $9\times {10}^{17}\,{{\rm{m}}}^{-3}$, 1.2 eV and $7.8\times {10}^{16}\,{{\rm{m}}}^{-3}$, 1.7 eV for argon and helium, respectively. In case of helium, a considerable part of the discharge power is dissipated in elastic electron-atom collisions, while for argon most of the input power is used for ionization. Phase-resolved optical emission spectroscopy reveals differently pronounced heating mechanisms. Whereas bulk heating is more prominent in argon compared to helium, the opposite trend is observed for sheath heating. This also explains the different behavior observed in the power-voltage characteristics.
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Publisher | |
Authors | |
Release Date | 2020-03-19 |
Identifier | 73a97faa-03b3-4f71-a25c-d52b2b69638a |
Permanent Identifier (URI) | |
Is supplementing | |
Plasma Source Name | |
Plasma Source Application | |
Plasma Source Specification | |
Plasma Source Properties | RF, 13.56 MHz, 1 slm gas flow, about 1 W input power |
License | |
Plasma Medium Name | |
Plasma Medium Properties | atmospheric pressure, 1 slm gas flow |
Contact Name | Golda, Judith |
Contact Email | |
Public Access Level | Public |
Funding Agency | |
Project |
Data and Resources
- Figure 3 Data Power dissipation voltage dependenceASCII tab separated
pressure 990 mbar
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(a) argon; flow rate 400 sccm
(b) helium; flow... - Figure 4 data Phase angle voltage dependenceASCII tab separated
pressure 990 mbar
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(a) argon; flow rate 400 sccm
(b) helium; flow... - Figure 6 data Electron density as function of dissipated powerASCII tab separated
pressure 990 mbar
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(a) argon: gas flow rate 400 sccm
(b) helium... - Figure 6 data Components of the power balance equationASCII tab separated
dissipated power of 0.6; pressure 990 mbar
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a) argon 400 sccm
b)... - Figure 8 data: phase-resolved emission plotszip
central lateral position (x = -15 mm) ; pressure 990 mbar
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a) argon 750... - Figure 7 data: Bulk and sheath width as function of dissipated powertxt
abnormal mode
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argon (400 sccm) and helium (1000 sccm)
pressure... - Figure 9 data: tempoal development Development of the intensity integrated across the discharge gap at different power valuesASCII tab separated
Development of the intensity integrated across the discharge gap
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a)...