C. Bock | Research Data Repository

Effective secondary electron yields for different surface materials in capacitively coupled plasmas

Project:

SFB TR 87

Authors:

F. Beckfeld

R. Masheyeva

A. Derzsi

D. Schulenberg

I. Korolov

C. Bock

J. Schulze

Z. Donkó

Plasma Science Fundamentals

Plasma Modeling and Simulation

Plasma for Materials / Surfaces

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Low-Temperature Plasma-Enhanced Atomic Layer Deposition of Tin(IV) Oxide from a Functionalized Alkyl Precursor: Fabrication and Evaluation of SnO2-Based Thin-Film Transistor Devices

Project:

SFB TR 87

Authors:

D. Zanders

L. Mai

E. Subasi

E. Ciftyurek

C. Hoppe

D. Rogalla

W. Gilbert

T. de los Arcos

K. Schierbaum

G. Grundmeier

C. Bock

A. Devi

Plasma for Materials / Surfaces

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PEALD of HfO2 Thin Films: Precursor Tuning and a New Near-Ambient-Pressure XPS Approach to in Situ Examination of Thin-Film Surfaces Exposed to Reactive Gases

Project:

SFB TR 87

Authors:

D. Zanders

E. Ciftyurek

E. Subasi

N. Huster

C. Bock

A. Kostka

D. Rogalla

K. Schierbaum

A. Devi

Plasma for Materials / Surfaces

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