Effective secondary electron yields for different surface materials in capacitively coupled plasmas Project: SFB TR 87Authors: F. BeckfeldR. MasheyevaA. DerzsiD. SchulenbergI. KorolovC. BockJ. SchulzeZ. DonkóPlasma Science FundamentalsPlasma Modeling and SimulationPlasma for Materials / Surfaces zip
Fiber PROES: Phase Resolved Optical Emission Spectroscopy via optical fibers for knowledge-based plasma process development and Project: SFB TR 87Authors: F. BeckfeldM. JanssenC. NeurothI. KorolovJ. SchulzePlasma Science Fundamentals zip
