Self-Organizing Sub-μm Surface Structures Stimulated by Microplasma Generated Reactive Species and Short-Pulsed Laser Irradiation Project: SFB 1316Authors: S. ChurL. KulikV. Schulz-von der GathenM. BökeJ. GoldaPlasma for Materials / Surfaces 6x xlsx Fig. 5: O density flow var 2x txt 7x jpeg 2x png