fig3a oxygen density
Atomic oxygen density determined by various methods as a function of applied voltage. Colored areas: confidence intervals. Conditions: 1 slm He, 5 sccm O2, 0.5 sccm Ar.
Atomic oxygen density determined by various methods as a function of applied voltage. Colored areas: confidence intervals. Conditions: 1 slm He, 5 sccm O2, 0.5 sccm Ar.