Datasets
1120 results
Electron density, temperature and the potential structure of spokes in HiPIMS
EP2
In high power impulse magnetron sputtering (HiPIMS) bright plasma spots are observed during the discharge pulses that rotate with velocities in the order of 10 km s −1 in front of the target surface. It has proven very difficult to perform any...
- 4x txt
Current and Voltage
EP2
- Electron density, temperature and the potential structure of spokes in HiPIMS
DCMS Dataset
EP2
- Synchronising optical emission spectroscopy to spokes in magnetron sputtering discharges
Synchronising optical emission spectroscopy to spokes in magnetron sputtering discharges
EP2
Spokes are patterns of increased light emission, observed to rotate in front of the targets of magnetron sputtering discharges. They move through the plasma at velocities of several km/s in or against the E⃗ × B⃗ direction of the discharge. The...
- 2x zip
HiPIMS Dataset
EP2
- Synchronising optical emission spectroscopy to spokes in magnetron sputtering discharges
High Power Impulse Magnetron Sputtering
High power impulse magnetron sputtering (HiPIMS) plasmas produce a very energetic growth flux for the synthesis of thin films with superior properties. High power densities in the range of a few kW/cm^2 are applied to a metal target electrode in...