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1133 results

State enhanced actinometry in the COST microplasma jet

PIP

Plasma Science Fundamentals

A new actinometry approach, state enhanced actinometry (SEA), is presented. This diagnostic uses the emission of the atomic states O(3p3P (λ=844.6 nm), Ar(2p1) (λ=750.4 nm) and He(33S) (λ=706.5 nm) and allows the atomic oxygen density and the...

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Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges

AEPT

Plasma Modeling and Simulation

With the increasing demands towards large area plasma etching and deposition, the radial uniformity of capacitively coupled plasmas (CCPs) becomes one of the key factors that determine process performance in industrial applications. However,...