Topics
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Plasma Specification
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Tags
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Group
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Authors
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Resource Quantity
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Resource Filetype
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Funding Agency
Project
Datasets
1120 results
Surface coefficients
AEPT
- Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges
Current densities of delta-electrons and elastically reflected electrons
AEPT
- Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges
Density and uniformity
AEPT
- Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges
Ionization rate at 0.6 Pa
AEPT
- Effects of a radial variation of surface coefficients on plasma uniformity in capacitive RF discharges