Total RF current density for SM D
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
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Datasets
1136 results
Total RF current density for SM C
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Total RF current density for SM B
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Total RF current density for SM A
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Averaged electron densities for SM D
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal fast delta electron density data for 55mm (down)
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Averaged electron densities for SM C
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Averaged electron densities for SM B
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Averaged electron densities for SM A
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges