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1042 results

fig. 7

PIP

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

fig. 5f

PIP

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

fig. 5b

PIP

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

fig. 5e

PIP

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

fig. 5c

PIP

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

fig. 5d

PIP

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

fig. 5a

PIP

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

Spatially and temporally resolved atomic oxygen densities in a micro cavity plasma array

PIP

Plasma Science Fundamentals

Micro cavity plasma arrays have numerous applications, such as the treatment of volatile organic compounds (VOCs) or the generation of new species. In recent years, the focus has also shifted to plasma catalysis, in which catalytic surfaces are...

17x txt

Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide

Inorganic Materials Chemistry

Plasma for Materials / Surfaces

New precursor chemistries for the atomic layer deposition (ALD) of aluminium oxide are reported as potential alternatives to the pyrophoric trimethylaluminium (TMA) which is to date a widely used Al precursor. Combining the high reactivity of...

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