EEDF of delta electrons for 55mm
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
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Project
Datasets
1042 results
EEDF of bulk electrons for 25mm
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal electric field data for 55mm
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal delta electron flux data for 55mm
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal fast bulk electron density data for 55mm (down)
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
spatio temporal fast bulk electron density data for 55mm (up)
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal fast gamma electron density data for 55mm (up)
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal gamma electron flux data for 55mm
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Electron power densities for SM C
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Electron power densities for SM D
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges