Electron power densities for SM A
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
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Funding Agency
Project
Datasets
1026 results
Contribution of each electron group to the total ionization rate for SM E
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal fast gamma electron density data for 55mm (down)
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Spatio temporal fast delta electron density data for 55mm (up)
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Electron power densities for SM B
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
EEDF of bulk electrons for 55mm
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Fraction of each electron group density to the total electron density for SM C
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Total RF current density for SM E
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Total RF current density for SM D
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Total RF current density for SM C
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges