figure_14_oxygendiffusion_0.05
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
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Funding Agency
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Datasets
1116 results
figure_13_ionflux_0.01
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_13_ionflux_0.05
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_13_ionflux_0.10
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_13_ionflux_0.20
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_14_oxygendiffusion_0.01
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_9_I130nm_500W_5Pa_simulation
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_8_I777nm_800W_5Pa_simulation_TN_exp
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_8_I777nm_800W_5Pa_simulation_TN_variations
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas
figure_12_r+_0.20
AEPT
- Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas