Averaged electron densities for SM D
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
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Funding Agency
Project
Datasets
975 results
Spatio temporal fast delta electron density data for 55mm (down)
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Averaged electron densities for SM C
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Averaged electron densities for SM B
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges
Averaged electron densities for SM A
AEPT
- Nonlocal dynamics of secondary electrons in capacitively coupled radio frequency discharges