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The group "Allgemeine Elektrotechnik und Plasmatechnik" at the faculty for engineering and information science.

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Numerical investigation of vacuum ultra-violet emission in Ar/O2 inductively coupled plasmas

FieldValue
Publisher
Authors
Release Date
2024-07-12
Identifier
16e5b7dc-7dfd-49e9-9eed-a51208099be4
Permanent Identifier (URI)
Is supplementing
Plasma Source Name
Plasma Source Application
Plasma Source Specification
Language
English (United Kingdom)
License
Plasma Medium Name
Contact Name
Andrew Gibson
Contact Email
Public Access Level
Public
Plasma Diagnostic Name
Funding Agency

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