Potential Precursor Alternatives to the Pyrophoric Trimethylaluminium for the Atomic Layer Deposition of Aluminium Oxide Project: SFB TR 87Authors: L. MaiN. BoysenD. ZandersT. de los ArcosF. MitschkerB. MallickG. GrundmeierP. AwakowiczA. DeviPlasma for Materials / Surfaces html
